FEATURES
TM & LL FEATURES
⊙ High throughout : Fast swap time
⊙ Customizing system : stack load lock, batch load lock,heater unit, cooling unit
⊙ AWC Function
⊙ Reliability and Easy Maintenance
⊙ Customizing system : stack load lock, batch load lock,heater unit, cooling unit
⊙ AWC Function
⊙ Reliability and Easy Maintenance
⊙ Load lock : batch & stack available
⊙ 5+5 batch type : heater unit
⊙ 2 Shelves, high & low stack, cooling Unit
⊙ Vacuum, gas line & I/O Box
⊙ Easy maintenance & Clean appearance
⊙ 5+5 batch type : heater unit
⊙ 2 Shelves, high & low stack, cooling Unit
⊙ Vacuum, gas line & I/O Box
⊙ Easy maintenance & Clean appearance
SPECIFICATION
