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Semiconductor
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Smart Factory
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Semiconductor
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Smart Factory
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Glass Transfer Robot
Vacuum Robot
Cassette Handling Robot
2G Glass Transfer Robot
4.5G Glass Transfer Robot
FEATURES
⊙ Capable of handling substrates for Gen 2
⊙
High stiffness arm structure against light weight
⊙
High reliability, productivity, precision
⊙
Low noise level
⊙
Easy maintenance
SPECIFICATION