FEATURES
TM & LL FEATURES
⊙ High throughout : Fast swap time
⊙ Customizing system : stack load lock, batch load lock,heater unit, cooling unit
⊙ AWC Function
⊙ Reliability and Easy Maintenance
⊙ Customizing system : stack load lock, batch load lock,heater unit, cooling unit
⊙ AWC Function
⊙ Reliability and Easy Maintenance
⊙ Load lock : Stacked load lock
⊙ Low stack : heater unit
⊙ High & low stack, cooling Unit
⊙ Vacuum, gas line & I/O Box
⊙ Easy maintenance & Clean appearance
⊙ Low stack : heater unit
⊙ High & low stack, cooling Unit
⊙ Vacuum, gas line & I/O Box
⊙ Easy maintenance & Clean appearance
SPECIFICATION
