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Semiconductor
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Semiconductor
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EFEM
Atmospheric Robot
Transfer Module
Vacuum Robot
Dual Arm Vacuum Robot
Compact Vacuum Robot
Quad Arm Vacuum Robot
SCARA Vacuum Robot
FEATURES
⊙
Type : Single arm(3 axis) / dual arms(4 axis)
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High Throughput ( Swap time )
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Proven 4-bar link arm [ Particle free ]
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High Rigidity ( Sag & Wobble )
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AWC function available (Auto Wafer Centering)
Detailed
Product Description
SPECIFICATION
PLATFORM MODEL