FEATURES
  ⊙ Type : Single arm(3 axis) / dual arms(4 axis)
  ⊙ High Throughput ( Swap time )
  ⊙ Proven 4-bar link arm [ Particle free ]
  ⊙ High Rigidity ( Sag & Wobble )
  ⊙ AWC function available (Auto Wafer Centering)

Detailed Product Description
SPECIFICATION

PLATFORM MODEL