- VACTRA-Q
- VACTRA-D
- VACTRA-SP
- VACTRA-Orbit
- VACTRA-Pinnacle
VACTRA-SERIES
7-Axes
VACTRA-Q
VACTRA-Q is a vacuum robot responsible for transferring wafers in a high-vacuum environment during semiconductor manufacturing processes.
- Body Size
- Ø312mm x 935mm
- Rotation Radius
- R496
- Max. Stroke
-
R-Axis ≤ 960mm(C to C)
T-Axis 330°
Z-Axis 150mm
-
Link-Type Arm Module
- High repeatability
- Patented structure
-
High AWC Precision
- One-Step Position Correction
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Independent Operation of Four Arms
- Control of individual arms possible
VACTRA-SERIES
4-Axes
VACTRA-D
VACTRA-D is another vacuum robot model in the VACTRA series, designed for wafer transfer in high-vacuum environments during semiconductor manufacturing processes.
- Body Size
- Ø380mmx540mm, 726mm
- Rotation Radius
- R450mm
- Max. Stroke
-
R-Axis ≤ 1000mm(C to C)
T-Axis 359°
Z-Axis 95mm, 215mm
-
Particle free
-
Single/Dual Pick & Place
-
High AWC Precision
VACTRA-SERIES
4-Axes
VACTRA-SP
- Body Size
- Ø320mm x 626mm
- Rotation Radius
- R272.5mm
- Max. Stroke
-
R-Axis ≤ 700mm(C to C)
T-Axis 330°
Z-Axis 150mm
-
High AWC Precision
-
Single/Dual Pick & Place
-
Minimized Installation Footprint (600x600)
VACTRA-SERIES
5-Axes (SCARA)
VACTRA-Orbit
- Body Size
- Ø380mm x 810mm
- Rotation Radius
- R375mm
- Max. Stroke
-
R-Axis ≤ 965mm(C to C)
T-Axis 370° (±185°)
Z-Axis 150mm
Hand 370° (±185°)
-
Supports Continuous Processing (PM to PM)
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Individual Control of All Hands
-
Single Arm, Dual Hand Structure
VACTRA-SERIES
8-Axes / Dual(2) Arm, Quad(4) Hand
VACTRA-Pinnacle
- Body Size
- Ø372mm x 530mm
- Rotation Radius
- R330mm
- Max. Stroke
-
R-Axis ≤ 680mm(C to C)
T-Axis 330°
Z-Axis 90mm
-
Dual Arm, Quad Hand Structure
-
Individual Control of All Hands
-
Minimized Installation Footprint
-
Supports Scissor Motion
-
Minimum Rotation Radius: 330 mm