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Semiconductor
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Smart Factory
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Semiconductor
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Smart Factory
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Glass Transfer Robot
Vacuum Robot
Cassette Handling Robot
Cassette Handling Robot
FEATURES
⊙ Supports glass cassette of 4th ~8th generation
⊙
High stiffness arm structure against light weight
⊙
High throughput through optimal motion control
⊙
High reliability, productivity, precision
⊙
Easy maintenance
⊙
Low noise level
SPECIFICATION