FEATURES
⊙ Application for Cluster Tool(8G) / CVD, PE-CVD, Etcher, etc
⊙ High temp. compatible
⊙ Monitoring for motor torque & temperature available
⊙ High rigidity through link mechanism on arm
⊙ Low gas emission by eliminating belt drive in vacuum environments.
⊙ Sensors for substrate detection can be wired internally.
⊙ Magnetic seal used for all drive in vacuum environments
⊙ High temp. compatible
⊙ Monitoring for motor torque & temperature available
⊙ High rigidity through link mechanism on arm
⊙ Low gas emission by eliminating belt drive in vacuum environments.
⊙ Sensors for substrate detection can be wired internally.
⊙ Magnetic seal used for all drive in vacuum environments
SPECIFICATION
