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Semiconductor
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Smart Factory
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KOR
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Semiconductor
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Smart Factory
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EFEM
Atmospheric Robot
Transfer Module
Vacuum Robot
Dual Arm Vacuum Robot
Compact Vacuum Robot
Quad Arm Vacuum Robot
SCARA Vacuum Robot
FEATURES
⊙
High throughput & reliability using 5 axis vacuum robot
⊙
AWC function available
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Applicable to different continuous process (@ Twin Process Ch.)